Complete range
From ultra compact mass flow meters and controllers for single
gases up to highly integrated customized manifold units for
measuring and controlling multiple gases, the new Axetris MFM /
MFC 2000 product range is suited for a wide range of applications.
The modular design and broad range enables seamless integration
of the newest flow sensing and control technology into your
products.
High accuracy and short reaction time
The high accuracy and short reaction time open new possibilities
for the controlling of gases with a speed and precision not possible
before. This capability enables: tighter control of process parameters,
increased system throughput, and reduced carrier gas
consumption.
Compact size
The compact size of the Axetris mass flow sensors and controllers
lets you add new functionality to your system while reducing the
size and weight.
Multi-gas / multi-range capability
Each module can be configured for different flow ranges and/or
different gases thus reducing the part complexity.
Full calibration and compensation
Each Axetris MFM / MFC 2000 unit is delivered fully calibrated
and temperature compensated. The calibration is NIST traceable.
Broad gas and flow range
The MFM / MFC 2000 products are available for a broad range of
non-aggressive gases with flow ranges from below 20 sccm to 3000
sccm (standard cubic centimeters per minute). Even higher flow
ranges can be reached with an external bypass.
| Benefits | Applications |
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| Meter | Controller | Customized Systems | |||
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MFM 2020 MFM 2022 |
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MFC 2022 |  |
MFY 20000 Series |
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MFM 2100 Series |
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MFC 2100 Series |
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MFY 21000 Series |
Note: Typical pictures are shown only. For the actual design variant and availability contact Axetris.
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Customized gas mixing and blending systems
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