MASS FLOW

MEMS based ultra compact mass flow meters and controllers, modules and systems for OEM applications

INFRARED SOURCES

MEMS based broadband infrared (IR) sources for NDIR gas sensors

LASER GAS DETECTOR

Diode-based laser gas detection (LGD) OEM modules for NH3, CO2, CH4 and O2 in process & emission control, climate and safety

MICRO OPTICS

Fused Silica and Silicon based diffractive and refractive micro optic lenses and lens arrays for applications ranging from UV to IR

MEMS SERVICES

Standard and custom MEMS services offered in a 6” / 8” wafer, class 100 fabrication environment