Mass Flow Controllers

MEMS based mass flow controller designed for OEM applications. The Axetris mass flow controllers are the ideal choice for applications requiring small size, high stability, fast response time and high turn down ratio.

Massflow Controller Product Range
7
Mass Flow Controller
  • MFC Plus - New

    Mass Flow Controller for full scale flows up to 15,000 sccm. Main features are an unmatched dynamic range and compact size.
    全新的质量流量控制器 MFC Plus
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  • MFC 2152

    MEMS based mass flow controller with housing and RS-485 full duplex interface
    Axetris - Mass Flow Controller - MFC 2122
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  • MFC 2132

    MEMS based mass flow controller with housing, RS-232 EIA and analog 4…20 mA interface
    Axetris - Mass Flow Controller - MFC 2122
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  • MFC 2122

    MEMS based mass flow controller MFC 2122 with 0…5 V and RS232 EIA Interface
    Axetris - Mass Flow Controller - MFC 2122
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  • MFC 2252

    MEMS based mass flow controller module with RS-485 full duplex interface
    Mass flow devices MFM 2242 BE-B
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  • MFC 2222

    MEMS based mass flow controller module with RS-232 EIA and analog 0…5 V interface
    Mass flow devices MFM 2242 BE-B
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  • MFC 2022

    MEMS based mass flow controller module MFC 2022 with 0…5 V and RS-232 TTL Interface
    Axetris - Mass Flow Controller - MFC 2022
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