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News :: 10/27/2015

In the Blink of an Eye - Ultrafast MFCs for control loop integration

Settling time Axetris MFD

Leister Corporate, Axetris, Mass Flow Devices

Axetris mass flow controllers achieve an ultrafast settling time of 150 ms. This enables Axetris customers to use the MFC as the controlling element in process control loops. A number of Axetris customers have thus been able to eliminate complexity - and costs!

Axetris MFCs use MEMS technology to deliver exceptional mass flow measurement – which means that the temperature difference of a miniscule gas sample is measured by a MEMS chip. This innovating way of designing a thermal mass flow sensor enables extremely quick response times. A sensor response of 4 ms, combined with an intelligent system design, helps the Axetris MFCs provide a stable gas flow control (settling time, with practically no overshoot) within 150 ms – literally “in the blink of an eye”!


Ultrafast MFCs – such as the one from Axetris – bring concrete advantages for OEM customers who design analytical instruments or industrial thin film and plasma equipment, where a number of process parameters have to be measured and controlled. Typical examples of such control loops are:

  • Pressure control within gas sample cells in spectroscopic instruments
  • Split ratio control in gas chromatography sampling systems
  • Vacuum chamber pressure control in thin film deposition instruments

A number of Axetris customers have been able to eliminate complex control loops by using the Axetris MFCs’ quick settling time, thereby realizing huge cost savings.


Read more about Axetris mass flow meters and controllers.

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