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Semiconductor Fabrication

Control and detection of various gases is essential for semiconductor fabrication or Chemical Vapor Deposition (CVD) processes.


In semiconductor fabrication, various etchants can be measured using NDIR technology, and the measurement can be used for process control. In CVD processes, e.g. Metal-Organic Chemical Vapor Deposition (MOCVD), NDIR detection can be used for precursor delivery systems.


NDIR is a preferred detection method for gases absorbing in the mid IR range, delivering high detectivity and stable measurement performance over time.


Advantages of Axetris Infrared Sources :

  • High emission at 4.26μm
  • Small size
  • Fast electrical modulation (Modulation frequency: >10Hz)
  • High modulation depth
  • Low power consumption
  • Long lifetime

Axetris offers solutions by providing a portfolio of IR sources with several reflector with /or without integrated windows (BaF2, CaF2, GeART100).


 

EMIRS 200

Chip on TO header

EMIRS200 on TO39

仅带芯片的光源

Customized

EMIRS200 on TO39 with customized Assembly (special Reflector, Flex-print, etc.)

客户定制

TO39 with Cap

EMIRS200 on TO39 with Metal Cap

带有保护帽 的TO39封装

TO39 with Reflector1

EMIRS200 on TO39 with Reflector1 (Focal length 5-15mm) and 4 kinds of Windows

带有反射面1的TO39封装

TO39 with Reflector2

EMIRS200 on TO39 with Reflector2 (Focal length 0-7mm)

带有反射面2的TO39封装

TO39 with Reflector3

EMIRS200 on TO39 with Reflector3 (Focal length 10-30mm) and 2 kinds of Windows

带有反射面3的TO46封装

TO39 with Reflector4

EMIRS200 on TO39 with Reflector4 (Focal length: 0 - 30 mm) and 4 kinds of Windows

带有反射面4的TO46封装

EMIRS 50

Chip on TO header

EMIRS50 on TO46 Basic Version (Chip on Header only)

仅带芯片的光源

Customized

EMIRS50 on TO46 Customized

客户定制

TO46 with Cap

EMIRS50 on TO46 with Cap

带有保护帽的TO46封装

TO46 with Reflector5

EMIRS50 on TO46 with Reflector5 and optional Sapphire or BaF2 Window

带有反射面5的TO46封装

TO46 with Reflector6

EMIRS50 on TO46 with Reflector6 - no window - back vented

Axetris_IRS_TO46_withreflector6_603_940

Item added to watchlist