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Thin Film Coating
薄膜镀层控制

Thin film deposition processes, e.g. reactive PVD (Physical Vapor Deposition), require a repeatable gas flow of the reactive gas to ensure reproducible film properties. With its industry-leading repeatability of < ± 0.15% FS and very small long term drift the Axetris MFC 2100 series supports you in making your equipment stable and easy to use for your customer.


The small size of the MFC 2100 series allows you to mix gases either outside or inside of the process chamber. It allows you also to build very compact distribution manifolds to ensure a uniform gas distribution in the chamber, thereby achieving uniform layer properties.


Customers who want to build their own mass flow controllers to optimize their system design or to protect their intellectual property, can rely upon Axetris products such as the mass flow controller modules (MFC 2200 series) or the mass flow meter modules (MFM 2200 series).


 

 

Mass Flow Controller

MFC 2022

MEMS based mass flow controller module MFC 2022 with 0…5 V and RS-232 TTL Interface

Axetris - Mass Flow Controller - MFC 2022

MFC 2122

MEMS based mass flow controller MFC 2122 with 0…5 V and RS232 EIA Interface

Axetris - Mass Flow Controller - MFC 2122

MFC 2132

MEMS based mass flow controller with housing, RS-232 EIA and analog 4…20 mA interface

Axetris - Mass Flow Controller - MFC 2122

MFC 2152

MEMS based mass flow controller with housing and RS-485 full duplex interface

Axetris - Mass Flow Controller - MFC 2122

MFC 2222

MEMS based mass flow controller module with RS-232 EIA and analog 0…5 V interface

Mass flow devices MFM 2242 BE-B

MFC 2252

MEMS based mass flow controller module with RS-485 full duplex interface

Mass flow devices MFM 2242 BE-B

MFC Plus

Mass Flow Controller for full scale flows up to 20,000 sccm. Main features are an unmatched dynamic range and compact size.

全新的质量流量控制器 MFC Plus

Mass Flow Meter

MFM 2020

Mass Flow Meter Module MFM 2020 with 0…5 V and RS-232 TTL Interface

Axetris - Mass Flow Meter - MFM 2020

MFM 2120

Mass Flow Meter MFM 2120 with 0…5 V and RS232 EIA Interface

Mass flow devices MFM 2120 BE S a

MFM 2130

MEMS based mass flow meter with housing, RS-232 EIA and analog 4…20 mA interface

Mass flow devices MFM 2120 BE S a

MFM 2150

MEMS based mass flow meter with housing and RS-485 full duplex interface

Mass flow devices MFM 2120 BE S a

MFM 2220

MEMS based mass flow meter module with RS-232 EIA and analog 0…5 V interface

Mass flow devices MFM 2240 B-B

MFM 2250

MEMS based mass flow meter module with RS-485 full duplex interface

Mass flow devices MFM 2240 B-B

MFM Plus

Mass Flow Meter for full scale flows up to 20,000 sccm.

全新的质量流量计MFM Plus

Mass Flow Manifolds

Custom Solutions

Custom mass flow manifold solutions, tailor-made for every individual customer's specific needs.

Axetris Mass Flow Manifolds Custom Solutions

Standard Platform

Available for use with up to 4 mass flow controllers/meters in mixer or splitter configurations.

Axetris Mass Flow Manifolds Standard Platform

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