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Axetris MFD – Mass Flow Devices

Mass Flow Meters, Controllers and Manifolds

Axetris offers OEM Mass Flow Meters (MFM), Controllers (MFC) and Manifolds for gases of outstanding value to the customer. The proprietary platinum-based MEMS chip technology guarantees excellent accuracy and repeatability in combination with high speed and an extended dynamic range. The advantages of the platinum-based MEMS technology, combined with smart software processing and robust packaging, make Axetris Mass Flow Meters and Controllers an ideal choice for demanding OEM applications.


The Axetris mass flow technology is used by many leading companies in the field of gas chromatography, leak testing, thermal analysis, mass spectroscopy, thin film deposition, plasma engineering and more.

A broad range of standard modules and products are available. These modules provide OEM customers with an easy and seamless integration of the leading mass flow controller technology into their products. Due to the benefits of the platinum MEMS technology, they are achieving an increase in performance.



Key Features:

  • Platinum-based MEMS technology
  • High accuracy and repeatability
  • Ultra compact size
  • Ultra-fast response time
  • High dynamic range
  • Bidirectional flow measurement
  • Flow range zooming (optional)
  • Full temperature compensation (0 to 50°C)
  • Multi-gas/range capability, up to eight calibration curves
  • Anemometric measurement principle
  • Broad range of solutions


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