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MFM Plus

This mass flow meter is designed for full scale flows up to 20,000 sccm. Main features are an unmatched dynamic range and compact size.

It offers the following advantages:

  • Unmatched Dynamic Range
  • Excellent Repeatability
  • Miniature Size
  • Designed for OEMs

Technical Data

Details MFC Plus + Add to Watchlist + Add to Comparison Print Specifications

Article No. **

Attribute Unit Value
Flow Range (N2 equivalent) sccm 0 – 20,000
Dimensions mm mm 50 x 52 x 22 (OEM Mass Flow Controller)
Flow Accuracy ± 0.2 % F.S. / ± 1 % O.R. whichever is greater
Repeatability ± 0.015 % F.S. / ± 0.15 % O.R. whichever is greater
Resolution % F.S. 0.01
Remarks For detailed specification values, please consult the product datasheet

Item added to watchlist