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News :: 06/03/2015

Axetris Mass Flow Controllers with World-Class Repeatability

Setup and Measurement according to SEMI E56-0309

Leister Corporate, Axetris, Mass Flow Devices

In a variety of analytical applications where mass flow products – mass flow controllers (MFC’s) and mass flow meters (MFM’s) - are used, it is often not the absolute accuracy, but the repeatability that is critical towards achieving high performance.

In a recent test of randomly-selected Axetris MFC’s, the majority of measurements using these devices proved to surpass the repeatability of +/- 0.1% Of Reading (O.R.).

Standard MFC’s available today generally specify a repeatability range which is at least twice of this value. These test results once again enforce the superior performance delivered by Axetris mass flow products.


Read more on Environmental Technology Online.

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