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MFC 2022

Small ultra compact mass flow controller module with RS-232 TTL and analog 0...5 V interface, based on the proprietary Platinium MEMS technology from Axetris (MEMS: Micro Electro- Mechanical System ). It offers the following advantages:
  • Ultra compact size
  • Fast settling time < 150 ms
  • Excellent repeatability and accuracy
  • Rigid stable design 
  • High turn down ratio > 1000:1
  • High long term stability

It is recommended for system integration in Industrial, Analytical and Medical applications.

Technical Data

Details MFC 2022, analog 0...5V and RS-232 TTL interface + Add to Watchlist + Add to Comparison Print Specifications

Article No. **

Attribute Unit Value
Flow Range (N2 equivalent) sccm 0 – 15,000
Target Gas N2, Air, O2, CO2, Ar, He, H2
Flow Accuracy
Settling Time ms < 150
Voltage supply V 24
Analog input V 0...5
Analog output V 0...5
Digital input / output RS-232 TTL

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