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Standard Platform

The standard platform for mass flow manifolds is available for use with up to 4 mass flow controllers or meters, mounted on a single base plate. The manifold is available in mixer or splitter configurations, whereby each channel can be calibrated according to customer requirements. This product is ideal as a compact, ready-to-use solution to mix or split gas streams with utmost accuracy and reproducibility.

Technical Data

Details Mass Flow Manifold Standard Platform + Add to Watchlist + Add to Comparison Print Specifications

Article No. **

Attribute Unit Value
Flow Range (N2 equivalent) sccm up to 15,000 per channel
Target Gas N2, Air, O2, CO2, Ar, He, H2
Mechanical Interface Up to 4
Flow Accuracy Axetris standard
Settling Time ms < 150
Voltage supply V 24
Digital input / output RS-232またはRS-485
Electronic Interface Common Electronic Interface Board with D-Sub 9 Connector (Optional)

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