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MEMS based mass flow controller designed for OEM applications. The Axetris mass flow controllers are the ideal choice for applications requiring small size, high stability, fast response timeand high turn down ratio. For an overview about our product variants, please also consult our Product Selection Key.
The trusted Axetris MFC 2100 Series is also available with an integrated downstream shut-off valve.
Mass Flow Controller for full scale flows up to 20,000 sccm. Main features are an unmatched dynamic range and compact size.
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