Mass Flow Controller

Product Range

Mass Flow Controller

MEMS based mass flow controller designed for OEM applications. The Axetris mass flow controllers are the ideal choice for applications requiring small size, high stability, fast response time and high turn down ratio.

Mass Flow Controller

MFC 2022

MEMS based mass flow controller module MFC 2022 with 0…5 V and RS-232 TTL Interface

MFC 2100 Series with integrated shut-off valve

The trusted Axetris MFC 2100 Series is also available with an integrated downstream shut-off valve.

Axetris_DB-B2_MFC-Shutoff-Valve_01_frei_2

MFC 2122

MEMS based mass flow controller MFC 2122 with 0…5 V and RS232 EIA Interface

MFC 2132

MEMS based mass flow controller with housing, RS-232 EIA and analog 4…20 mA interface

MFC 2152

MEMS based mass flow controller with housing and RS-485 full duplex interface

MFC 2162

MEMS based mass flow controller with PROFINET interface

MFC 2172

MEMS based mass flow controller with EtherCAT interface.

MFC 2222

MEMS based mass flow controller module with RS-232 EIA and analog 0…5 V interface

MFC 2252

MEMS based mass flow controller module with RS-485 full duplex interface

MFC Plus

Mass Flow Controller for full scale flows up to 20,000 sccm. Main features are an unmatched dynamic range and compact size.