We use Cookies to give you a better experience while surfing on our website and we use such data for statistical purposes. By applying the adequate settings in your browser you have control over the acceptance of Cookies. Find out more here

OK
NO THANKS

Axetris Europe

Axetris Amerikas

Asia+Oceania

Africa+Middle East

  • Switzerland | DE / EN
  • Germany | DE / EN
  • Turkey | EN
  • Rest of the World | EN
  • Great Britain | EN
  • Canada | EN
  • USA | EN / DE / ZH / JA
  • Rest of the World | EN
  • 中国 | ZH / EN / JA
  • India | EN
  • 日本 | JA / EN
  • 대한민국 | EN
  • Rest of the World | EN
  • Rest of the World | EN

MFC 2100 Series with integrated shut-off valve

The trusted Axetris MFC 2100 Series is also available with an integrated downstream shut-off valve. A perfect combination of the Axetris proprietary Platinum MEMS technology with guaranteed leak tightness for high vacuum applications. It offers the following advantages:

 

- Ultra compact size

- Fast settling time < 150 ms

- Excellent repeatability and accuracy

- Rigid stable design 

- High turn down ratio >1000:1

- High long term stability

- Integrated shut-off valve to guarantee leak tightness

 

It is recommended for system integration in Industrial, Analytical and Medical applications.

Technical Data

Details MFC 2100 Series + Add to Watchlist + Add to Comparison Print Specifications

Article No. **

Attribute Unit Value
Flow Range (N2 equivalent) sccm 0 – 10,000
Target Gas N2, Air, O2, CO2, Ar, He, H2
Flow Accuracy Please consult product datasheet
Settling Time ms < 150
Voltage supply V 24
Analog input V 0...5
Analog output V 0...5
Digital input / output RS-232 EIA / RS-485 / PROFINET / EtherCAT (Depending on MFC model)

Item added to watchlist