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MFC 2100 Series with integrated shut-off valve

The trusted Axetris MFC 2100 Series is also available with an integrated downstream shut-off valve. A perfect combination of the Axetris proprietary Platinum MEMS technology with guaranteed leak tightness for high vacuum applications. It offers the following advantages:


- Ultra compact size

- Fast settling time < 150 ms

- Excellent repeatability and accuracy

- Rigid stable design 

- High turn down ratio >1000:1

- High long term stability

- Integrated shut-off valve to guarantee leak tightness


It is recommended for system integration in Industrial, Analytical and Medical applications.

Technical Data

Details MFC 2100 Series + Add to Watchlist + Add to Comparison Print Specifications

Article No. **

Attribute Unit Value
Flow Range (N2 equivalent) sccm 0 – 10,000
Target Gas N2, Air, O2, CO2, Ar, He, H2
Flow Accuracy Please consult product datasheet
Settling Time ms < 150
Voltage supply V 24
Analog input V 0...5
Analog output V 0...5
Digital input / output RS-232 EIA / RS-485 / PROFINET / EtherCAT (Depending on MFC model)

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