MFC 2100 Series with integrated shut-off valve

The trusted Axetris MFC 2100 Series is also available with an integrated downstream shut-off valve. A perfect combination of the Axetris proprietary Platinum MEMS technology with guaranteed leak tightness for high vacuum applications. It offers the following advantages:

- Ultra compact size

- Fast settling time < 150 ms

- Excellent repeatability and accuracy

- Rigid stable design

- High turn down ratio >1000:1

- High long term stability

- Integrated shut-off valve to guarantee leak tightness

It is recommended for system integration in Industrial, Analytical and Medical applications.

Technical Data

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Article No. **

Attribute	Unit	Value
Flow Range (N2 equivalent)	sccm	0 – 20,000
Target Gas		N2, Air, O2, CO2, Ar, He, H2
Flow Accuracy		Please consult product datasheet
Settling Time	ms	< 150
Voltage supply	V	24
Analog input	V	0...5
Analog output	V	0...5
Digital input / output		RS-232 EIA / RS-485 / PROFINET / EtherCAT (Depending on MFC model)