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MFC 2122

Compact mass flow controller with RS-232 EIA and analog 0...5 V interface, based on the proprietary Platinum MEMS technology from Axetris (MEMS: Micro Electro-Mechanical Systems). It offers the following advantages:
  • Ultra compact size
  • Fast settling time < 150 ms
  • Excellent repeatability and accuracy
  • Rigid stable design 
  • High turn down ratio >1000:1
  • High long term stability
It is recommended for stand alone applications and system integration in Industrial, Analytical and Medical applications.

Technical Data

Details MFC 2122, analog 0...5V and RS-232 EIA interface + Add to Watchlist + Add to Comparison Print Specifications

Article No. **

Attribute Unit Value
Flow Range (N2 equivalent) sccm 0 – 20,000
Target Gas N2, Air, O2, CO2, Ar, He, H2
Flow Accuracy Please consult product datasheet
Settling Time ms < 150
Voltage supply V 24
Analog input V 0...5
Analog output V 0...5
Digital input / output RS-232 EIA

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