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MFC 2162

Compact mass flow controller with PROFINET interface, based on the proprietary Platinum MEMS technology from Axetris (MEMS: Micro Electro-Mechanical Systems).


It offers the following advantages:

  • Ultra compact size
  • Fast settling time < 150 ms
  • Excellent repeatability and accuracy
  • Rigid stable design
  • High dynamic range > 1000:1
  • High long-term stability
  • Ethernet connectivity with a PROFINET interface


It is recommended for standalone applications and system integration in industrial, analytical and medical applications where the MFCs need to be integrated into Ethernet-based networks with a PROFINET communication interface. 

Technical Data

Details MFC 2162 + Add to Watchlist + Add to Comparison Print Specifications

Article No. **

Attribute Unit Value
Flow Range (N2 equivalent) sccm 0 – 10,000
Target Gas N2, Air, O2, CO2, Ar, He, H2
Flow Accuracy Please consult product datasheet
Settling Time ms < 150
Voltage supply V 24
Digital input / output PROFINET

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