Compact mass flow controller with EtherCAT interface, based on the proprietary Platinum MEMS technology from Axetris (MEMS: Micro Electro-Mechanical Systems).

 

It offers the following advantages:

• Ultra compact size
• Fast settling time < 150 ms
• Excellent repeatability and accuracy
• Rigid stable design
• High dynamic range > 1000:1
• High long-term stability
• Ethernet connectivity with a EtherCAT interface

 

It is recommended for standalone applications and system integration in industrial, analytical and medical applications where the MFCs need to be integrated into Ethernet-based networks with an EtherCAT communication interface.