Compact mass flow controller with EtherCAT interface, based on the proprietary Platinum MEMS technology from Axetris (MEMS: Micro Electro-Mechanical Systems).
It offers the following advantages:
- Ultra compact size
- Fast settling time < 150 ms
- Excellent repeatability and accuracy
- Rigid stable design
- High dynamic range > 1000:1
- High long-term stability
- Ethernet connectivity with a EtherCAT interface
It is recommended for standalone applications and system integration in industrial, analytical and medical applications where the MFCs need to be integrated into Ethernet-based networks with an EtherCAT communication interface.