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MFM 2020

Small compact mass flow meter module with RS-232 TTL and analog 0...5 V interface, based on the proprietary Platinium MEMS technology from Axetris (MEMS: Micro Electro-Mechanical Systems). It offers the following advantages:
  • Ultra compact size
  • Fast response time
  • Excellent repeatability and accuracy
  • Rigid stable design 
  • High dynamic range
  • High long term stability
It is recommended for system integration in Industrial, Analytical and Medical applications.

Technical Data

Details MFM 2020, analog 0...5V and RS-232 TTL interface + Add to Watchlist + Add to Comparison Print Specifications

Article No. **

Attribute Unit Value
Flow Range (N2 equivalent) sccm 0 – 15,000
Target Gas N2, Air, O2, CO2, Ar, He, H2
Flow Accuracy
Response Time ms < 4
Voltage supply V 12
Analog output V 0...5
Digital input / output RS-232 TTL

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