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Materials

  • Clean-room equipped for 100 mm - 200 mm wafers
  • Micro-optics mostly done on 150 and 200 mm wafers
  • Wafer have no "flat" or "notch" (unlike standard semiconductor wafers)

 

Material
Standard thickness (mm)
 Tolerances (typical)
 Fused silica
 0.5 / 0.6 / 1.0 / 1.6
 ± 0.025 mm
 Silicon  0.15 / 0.25 / 0.38 / 0.5 / 0.7 / 1.0
 ± 0.015 mm / 0.025 mm

 

Other thicknesses and tolerances possible.

 

Alignment marks & data

  • Alignment marks placed in North/South/East/West position
  • Wafermap&data files available if delivered as full or diced wafer

Item added to watchlist