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Axetris Europe

Axetris Amerikas

Asia+Oceania

Africa+Middle East

  • Switzerland | DE / EN
  • Germany | DE / EN
  • Rest of the World | EN
  • Great Britain | EN
  • Canada | EN
  • USA | EN / DE / ZH / JA
  • Rest of the World | EN
  • 中国 | ZH / EN / JA
  • India | EN
  • 日本 | JA / EN
  • 대한민국 | EN
  • Rest of the World | EN
  • Rest of the World | EN

Advantages

Precise lens placement: lithographic process

  • Pitch accuracy typically < 0.25µm

 

Precise lens shape

  • ROC and conic control during etching
  • Low surface profile deviation (typ. < 25nm RMS)

 

High surface quality

  • Low surface roughness (typically < 2nm RMS)

 

Wafer-level manufacturing

  • Scalability for high volumes

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