Materials
- Clean-room equipped for 100 mm - 200 mm wafers
- Micro-optics mostly done on 150 and 200 mm wafers
- Wafer have no "flat" or "notch" (unlike standard semiconductor wafers)
Material |
Standard thickness (mm) |
Tolerances (typical) |
Fused silica |
0.5 / 0.6 / 1.0 / 1.6 |
± 0.025 mm |
Silicon | 0.15 / 0.25 / 0.38 / 0.5 / 0.7 / 1.0 |
± 0.015 mm / 0.025 mm |
Other thicknesses and tolerances possible.
Alignment marks & data
- Alignment marks placed in North/South/East/West position
- Wafermap&data files available if delivered as full or diced wafer