• Clean-room equipped for 100 mm - 200 mm wafers
• Micro-optics mostly done on 150 and 200 mm wafers
  
• Wafer have no "flat" or "notch" (unlike standard semiconductor wafers)

 

Material	Standard thickness (mm)	Tolerances (typical)
Fused silica	0.5 / 0.6 / 1.0 / 1.6	± 0.025 mm
Silicon	0.15 / 0.25 / 0.38 / 0.5 / 0.7 / 1.0	± 0.015 mm / 0.025 mm

 

Other thicknesses and tolerances possible.

 

Alignment marks & data

• Alignment marks placed in North/South/East/West position
• Wafermap&data files available if delivered as full or diced wafer