物質が気体の状態にある場合、個々の粒子は動いています。体積を圧縮することで、これらの粒子が互いに近づき、より頻繁に衝突が発生し、圧力が上昇します。
Axetris mass flow devices are based on the principle of thermal flow technology. We develop the platinum-based MEMS chip technology that enables the measurement of non-aggressive or corrosive gases such as air, nitrogen (N2), argon (Ar) or helium (He). The multi-gas option allows for flexible switching between gases without changing the device. Compared to others, this technology is particularly convincing due to its high measurement accuracy and fast response to flow changes. Thanks to the very high dynamic range of over 1000:1, flow rates can be flexibly realized as required.