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MFC 2162

Compact mass flow controller with PROFINET interface, based on the proprietary Platinum MEMS technology from Axetris (MEMS: Micro Electro-Mechanical Systems).

 

It offers the following advantages:

  • Ultra compact size
  • Fast settling time < 150 ms
  • Excellent repeatability and accuracy
  • Rigid stable design
  • High dynamic range > 1000:1
  • High long-term stability
  • Ethernet connectivity with a PROFINET interface

 

It is recommended for standalone applications and system integration in industrial, analytical and medical applications where the MFCs need to be integrated into Ethernet-based networks with a PROFINET communication interface. 

テクニカルデータ

Details MFC 2162 + Add to Watchlist + Add to Comparison Print Specifications

商品番号 **

属性 単位 価値
流量の範囲 (N2 相当) sccm 0 – 20,000
対象の気体 N2, Air, O2, CO2, Ar, He, H2
流量の正確性 Please consult product datasheet
設定時間 ms < 150
電圧源 V 24
デジタル入力/出力 PROFINET

Item added to watchlist