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MFC 2252

Small ultra compact mass flow controller module with RS-485 full duplex interface, based on the propertiarie Platinium MEMS technology from Axetris (MEMS: Micro Electronic Mechanical System). It offers the following  advantages
  • Ultra compact size
  • Fast settling time < 150 ms
  • Excellent repeatability and accuracy
  • Rigid stable design 
  • High turn down ratio > 1000:1
  • High long term stability

It is recommended for system integration in Industrial, Analytical and Medical applications

テクニカルデータ

Details MFC 2252, RS-485 full duplex interface + Add to Watchlist + Add to Comparison Print Specifications

商品番号 **

属性 単位 価値
流量の範囲 (N2 相当) sccm 0 – 20,000
対象の気体 N2, Air, O2, CO2, Ar, He, H2
流量の正確性 Please consult product datasheet
設定時間 ms < 150
電圧源 V 24
デジタル入力/出力

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