We use Cookies to give you a better experience while surfing on our website and we use such data for statistical purposes. By applying the adequate settings in your browser you have control over the acceptance of Cookies. Find out more here

MFC 2100 Series with integrated shut-off valve

The trusted Axetris MFC 2100 Series is also available with an integrated downstream shut-off valve. A perfect combination of the Axetris proprietary Platinum MEMS technology with guaranteed leak tightness for high vacuum applications. It offers the following advantages:

 

- Ultra compact size

- Fast settling time < 150 ms

- Excellent repeatability and accuracy

- Rigid stable design 

- High turn down ratio >1000:1

- High long term stability

- Integrated shut-off valve to guarantee leak tightness

 

It is recommended for system integration in Industrial, Analytical and Medical applications.

技术数据

Details MFC 2100 Series + Add to Watchlist + Add to Comparison Print Specifications

订购号 **

属性 单位 价值
流量范围 (N2对应) sccm 0 – 20,000
目标气体 N2, Air, O2, CO2, Ar, He, H2
流量精度 Please consult product datasheet
稳定时间 ms < 150
供电电压 V 24
模拟量输入 V 0...5
模拟量输出 V 0...5
数字量输入输出 RS-232 EIA / RS-485 / PROFINET / EtherCAT (Depending on MFC model)

Item added to watchlist