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MFC 2100 Series with integrated shut-off valve

The trusted Axetris MFC 2100 Series is also available with an integrated downstream shut-off valve. A perfect combination of the Axetris proprietary Platinum MEMS technology with guaranteed leak tightness for high vacuum applications. It offers the following advantages:


- Ultra compact size

- Fast settling time < 150 ms

- Excellent repeatability and accuracy

- Rigid stable design 

- High turn down ratio >1000:1

- High long term stability

- Integrated shut-off valve to guarantee leak tightness


It is recommended for system integration in Industrial, Analytical and Medical applications.


Details MFC 2100 Series + Add to Watchlist + Add to Comparison Print Specifications

订购号 **

属性 单位 价值
流量范围 (N2对应) sccm 0 – 20,000
目标气体 N2, Air, O2, CO2, Ar, He, H2
流量精度 Please consult product datasheet
稳定时间 ms < 150
供电电压 V 24
模拟量输入 V 0...5
模拟量输出 V 0...5
数字量输入输出 RS-232 EIA / RS-485 / PROFINET / EtherCAT (Depending on MFC model)

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