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MFC 2152

紧凑的质量流量控制器配有RS-485 通讯接口,基于Axetris专利的铂金MEMS技术(MEMS:微电子机械系统)它提供了以下的优势。  
  • 超紧凑的外形尺寸
  • 快速的稳定时间< 150 ms
  • 极佳的重复性和精度
  • 坚固的设计
  • 高量程比< 1000:1
  • 极佳的长期稳定性


Details MFC 2152, RS-485全双工接口 + Add to Watchlist + Add to Comparison Print Specifications

订购号 **

属性 单位 价值
流量范围 (N2对应) sccm 0 – 10,000
目标气体 N2, Air, O2, CO2, Ar, He, H2
流量精度 Please consult product datasheet
稳定时间 ms < 150
供电电压 V 24

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