We use Cookies to give you a better experience while surfing on our website and we use such data for statistical purposes. By applying the adequate settings in your browser you have control over the acceptance of Cookies. Find out more here

MFC 2162

Compact mass flow controller with PROFINET interface, based on the proprietary Platinum MEMS technology from Axetris (MEMS: Micro Electro-Mechanical Systems).


It offers the following advantages:

  • Ultra compact size
  • Fast settling time < 150 ms
  • Excellent repeatability and accuracy
  • Rigid stable design
  • High dynamic range > 1000:1
  • High long-term stability
  • Ethernet connectivity with a PROFINET interface


It is recommended for standalone applications and system integration in industrial, analytical and medical applications where the MFCs need to be integrated into Ethernet-based networks with a PROFINET communication interface. 


Details MFC 2162 + Add to Watchlist + Add to Comparison Print Specifications

订购号 **

属性 单位 价值
流量范围 (N2对应) sccm 0 – 10,000
目标气体 N2, Air, O2, CO2, Ar, He, H2
流量精度 Please consult product datasheet
稳定时间 ms < 150
供电电压 V 24
数字量输入输出 PROFINET

Item added to watchlist