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MFC 2172

Compact mass flow controller with EtherCAT interface, based on the proprietary Platinum MEMS technology from Axetris (MEMS: Micro Electro-Mechanical Systems).

 

It offers the following advantages:

  • Ultra compact size
  • Fast settling time < 150 ms
  • Excellent repeatability and accuracy
  • Rigid stable design
  • High dynamic range > 1000:1
  • High long-term stability
  • Ethernet connectivity with a EtherCAT interface

 

It is recommended for standalone applications and system integration in industrial, analytical and medical applications where the MFCs need to be integrated into Ethernet-based networks with an EtherCAT communication interface.

技术数据

Details MFC 2172 + Add to Watchlist + Add to Comparison Print Specifications

订购号 **

属性 单位 价值
流量范围 (N2对应) sccm 0 – 20,000
目标气体 N2, Air, O2, CO2, Ar, He, H2
流量精度 Please consult product datasheet
稳定时间 ms < 150
供电电压 V 24
数字量输入输出 EtherCAT

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