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标准平台

可供使用的质量流量集管标准平台,在单个基板上安装有多达 4 个质量流量控制器或者流量计。集管具有混合器或者分离器配置,从而可以根据客户要求,校准每一个通道。该产品是混合或者分离气体流的紧凑即用型解决方案,具有最高精确度和再现性。

技术数据

Details 质量流量集管标准平台 + Add to Watchlist + Add to Comparison Print Specifications

订购号 **

属性 单位 价值
流量范围 (N2对应) sccm up to 20,000 per channel
目标气体 N2, Air, O2, CO2, Ar, He, H2
Mechanical Interface Up to 4
流量精度 Axetris standard
稳定时间 ms < 150
供电电压 V 24
数字量输入输出 RS-232
Electronic Interface Common Electronic Interface Board with D-Sub 9 Connector (Optional)

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