Electrically modulated infrared sources by Axetris offer high emissivity with true blackbody radiation and a long lifetime.
Mass Flow Devices
Mass flow meters and controllers for gases by Axetris are based on MEMS chip technology and offer high accuracy with a wide measuring range.
Laser Gas Detection
Axetris laser gas detection modules provide optical, contactless measurement of gases with high selectivity and detection limits in the sub-ppm range.
Axetris offers high-quality and cost-effective, wafer-level manufacturing of customized microlenses and diffractive optical elements in silicon and fused silica.
Wafer Processing Services
Axetris offers processing services for wafers such as lithography, etching, thin film deposition and patterning on 150/200mm wafers.