Axetris manufactures custom silicon and fused silica microlens arrays on 150mm and 200mm wafers. The silicon-based lenses are particularly effective in high numerical aperture (NA) applications in the near-infrared region. Quartz-based products extend the portfolio in the visible wavelength range. Axetris microlens arrays offer high pitch accuracies as well as uniformities and enable high coupling efficiencies with fiber, waveguide or photodiode arrays.
Technical Data
Metric
Imperial
Material
Fused silica; Others on request; Silicon
Aperture shape
Circular; Elliptic; Rectangular
Surface profile
Acylindrical; Aspherical; Cylindrical; Spherical
Clear aperture diameter (CA)
10 - 2000 μm
Radius of curvature (ROC)
Lens specific; typ. > lens diameter and <4x lens diameter
Conic constant
Customer specific
Surface profile deviation (SPD)
Typ. < 25 nm RMS, depending on lens parameters
Surface roughness
Typ. < 2 nm RMS, max. 5 nm RMS
Surface finish/defects
Custom based on ISO 10110
Lens arrangement
Linear
Number of rows/columns
Customer specific
Lens row pitch
127 μm; 250 μm; 500 μm; 750 μm; Customer specific
Pitch accuracy
typ. < 0.25 µm
Anti-reflection coating
Against air or adhesive; Narrow or broadband; Others on request
Package form
Bluetape; Gelpak; Known good die; UV Tape
Additional description
Alignment and mechanical structures; glue-stop; metallization; front- and/or backside
