Axetris manufactures customized micro-lenses in silicon and fused silica on 150 and 200mm wafers. The silicon-based lenses are especially effective for high NA applications in the near-infrared range. Fused silica-based products extend the portfolio into the visible wavelength range. Axetris micro-lenses allow high coupling efficiencies (high NA and aspherical shape control) and tight integration due to their small size.
Technical Data
Metric
Imperial
Material
Fused silica; Others on request; Silicon
Aperture shape
Circular; Elliptic; Rectangular
Surface profile
Acylindrical; Aspherical; Cylindrical; Spherical
Clear aperture diameter (CA)
10 - 2000 μm
Radius of curvature (ROC)
Lens specific; typ. > lens diameter and <4x lens diameter
Conic constant
Customer specific
Surface profile deviation (SPD)
Typ. < 25 nm RMS, depending on lens parameters
Surface roughness
Typ. < 2 nm RMS, max. 5 nm RMS
Surface finish/defects
Custom based on ISO 10110
Anti-reflection coating
Against air or adhesive; Narrow or broadband; Others on request
Package form
Bluetape; Gelpak; Known good die; UV Tape
Additional description
Alignment and mechanical structures; glue-stop; metallization; front- and/or backside
