Axetris manufactures customized diffractive optical elements (DOEs) with up to 16 levels in silicon and fused silica on 150 and 200mm wafers. Both materials may be used in transmission and reflection, the latter usually requiring the application of surface metallization.
The Axetris DOE portfolio covers single chips typically sized in the millimeter range as well as undiced post-processed customer wafers.
Technical Data
Metric
Imperial
Material
Fused silica; Others on request; Silicon
Surface roughness
Typ. < 2 nm RMS, max. 5 nm RMS
Surface finish/defects
Custom based on ISO 10110
Anti-reflection coating
Against air or adhesive; Narrow or broadband; Others on request
Package form
Bluetape; Gelpak; Known good die; UV Tape
Number of levels
2 - 16
Additional description
Alignment and mechanical structures; glue-stop; metallization; front- and/or backside
